Table 1

Electrical and optical properties of silicon, silicon nitride, and silica

Material Refractive index Bandgap (eV) TO coefficient (K−1) Thermal conductivity (W m–1 K–1) Carrier mobility (cm2  v–1 s–1) Propagation loss (dB cm–1) a)
Silicon [6769] 3.467 1.1 1.86×10−4 80 1350 4
Silicon nitride [7073] ~2.0 5.3 2.5×10−5 20 0.06
Silica [71,74,75] 1.444 9 0.95×10−5 1.38 0.02b)

a) Propagation loss of integrated waveguides. In such waveguides, the corresponding material in the table is used as the waveguide core material and silica is used as the cladding material.

b) Extra doping process is required for the silica waveguide core. Thus, silica waveguide is usually not utilized on silicon photonics platform.

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