Electrical and optical properties of silicon, silicon nitride, and silica
|Material||Refractive index||Bandgap (eV)||TO coefficient (K−1)||Thermal conductivity (W m–1 K–1)||Carrier mobility (cm2 v–1 s–1)||Propagation loss (dB cm–1) a)|
|Silicon nitride [70–73]||~2.0||5.3||2.5×10−5||20||–||0.06|
a) Propagation loss of integrated waveguides. In such waveguides, the corresponding material in the table is used as the waveguide core material and silica is used as the cladding material.
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